Sh.B. Utamuradova, D.A. Rakhmanov, P.L. Tuan,
A.S. Doroshkevich, R.Sh. Isayev, A.S. Abiyev (pp.83-89)
Studying the influence of proton irradiation on the distribution profile of Pt and Cr in surface layers n-Si˂Pt˃, n-Si˂Сr˃ using ellipsometric spectroscopy