Defect Formation Processes in Silicon with Impurities of Thulium and Terbium
The influence of rare-earth elements (Tb, Tm) on the electrophysical and structural properties of single-crystal silicon was investigated. Silicon samples of the KEF-40, KEF-7.5, and KDB-20 grades were subjected to diffusion annealing at 1250 °C followed by rapid cooling. Neutron activation analysis confirmed impurity incorporation at the level of ~1016–1017 atoms/cm3. Doping was shown to cause changes in electrical resistivity and charge carrier concentration. Fourier-transform infrared spectroscopy revealed a decrease in the content of optically active oxygen. Raman spectroscopy showed a change in the main silicon phonon mode (~523 ) and the appearance of an additional line at approximately 245 . The obtained results indicate the possibility of modifying the properties of silicon by doping with rare-earth elements.